产品用途 | |
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TEL半导体设备国产化及 New Foreline System Remodeling | |
产品特征 | |
半导体 Diffusion 进度 Poly (B, C, D) / HTO, LTO, MTO / Nitride / Anneal / Teos / Pyro (Oxide) 装备国产化及 New Foreline System Remodeling |
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Poly (B, C, D) / HTO, LTO, MTO / Nitride / Anneal / Teos / Pyro (Oxide)